Demonstrating sub-nm closed loop MEMS flattening
نویسندگان
چکیده
منابع مشابه
Demonstrating sub-nm closed loop MEMS flattening.
Ground based high-contrast imaging (e.g. extrasolar giant planet detection) has demanding wavefront control requirements two orders of magnitude more precise than standard adaptive optics systems. We demonstrate that these requirements can be achieved with a 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror having an actuator spacing of 340 microm and a stroke of approximately 1...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2006
ISSN: 1094-4087
DOI: 10.1364/oe.14.005558